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  • Ion Implantation and Annealing Applications, Science and Technology

    Contributions from IIT School, Edition 2026

    Edited by Wilfried Lerch, Michael I. Current ...
    Series series Physics and Astronomy (R0)
    This book is a new, comprehensive, tutorial-style reference from the IIT2026 school that unifies ion implantation and annealing, guiding the reader from historical context and fundamental beam physics through to full process integration in advanced semiconductor manufacturing. It uniquely combines rigorous coverage of ion sources, beam transport, implanter and annealer hardware, and state of the ... Read more

    $179.09 USD