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  • Plasma Processing for Semiconductor Materials and Thin-Film Devices

    Edited by Kuan Yew Cheong, Behnam Akhavan, Shih-Nan Hsiao, Sheng-Chi Chen, Phuoc Huu Le ...
    Series series Vacuum and Thin-Film Deposition Technologies
    Plasma Processing for Semiconductor Materials and Thin-Film Devices covers the state-of-the-art in plasma processing of thin films. The book focuses on fundamental plasma theory, plasma for advanced applications, advanced characterization techniques, plasma and performance in semiconductor devices, and plasma processing. Sections consider the fundamental physics of plasma then move to advanced ... Read more

    $224.99 USD

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